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Check ID Equipment Manufacture Model Vintage Wafer
Size
Configuration Notes
SL1252-3 ETCH TEL Unity-2e-855DD 1998 8inch Oxide Etch, DRM chamber PDF File
SL1253 ETCH TEL Unity Ver II 845DD 1996 8inch Oxide Etch, DRM chamber PDF File
SL1254 ETCH TEL Unity 2e-844DD 1998 8inch Oxide Etch, DRM chamber PDF File